Inventor
KATSUYA AKIYAMA
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general31%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices15%
H01LSemiconductor devices15%
B01DSeparation8%
PatentTitleYear
11,921,426Substrate processing method, substrate processing apparatus, and recipe selection method202411,872,605Substrate processing method and substrate processing apparatus202411,543,752Substrate processing method, substrate processing apparatus, and recipe selection method202311,517,941Substrate processing method and substrate processing apparatus202211,331,625Gas treatment method and gas treatment apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2024Patents assigned to SCREEN HOLDINGS CO LTD (4)· patent assignee history
2022Patents assigned to KOBE STEEL LTD (1)· patent assignee history
2022Patents assigned to NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM (1)· patent assignee history
2022–2024Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SCREEN HOLDINGS CO LTD | 4 | 2022–2024 |
| KOBE STEEL LTD | 1 | 2022 |
| NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2022–2024 |