Inventor
Taro Ogata
Inventor
Tokyo, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
6,961,114'Optical apparatus and exposure apparatus incorporating the apparatus'20056,642,994'Optical exposure apparatus and photo-cleaning method'20036,538,722'Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatus'20036,492,649'Projection exposure apparatus, projection exposure method, optical cleaning method and method of fabricating semiconductor device'20026,411,368'Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatus'20026,268,904'Optical exposure apparatus and photo-cleaning method'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2005Patents assigned to NIKON CORP (6)· patent assignee history
2001–2003Based in Tokyo, JP· patent location history
2002Based in Kawasaki, JP· patent location history
2005Based in Chiyoda-ku, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NIKON CORP | 6 | 2001–2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 4 | 2001–2003 |
| Chiyoda-ku, JP | 1 | 2005 |
| Kawasaki, JP | 1 | 2002 |