Inventor
Tomiyasu Maezono
Inventor
Kumamoto, JP
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general18%
H01LSemiconductor devices18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
B01DSeparation9%
B01FMixing, e.g. dissolving, emulsifying or dispersing9%
B24BMachines, devices, or processes for grinding or polishing9%
C11DDetergent compositions9%
G05DSystems for controlling or regulating non-electric variables9%
PatentTitleYear
11,043,399Substrate processing apparatus and operation method of substrate processing apparatus202110,067,514Substrate processing apparatus and liquid mixing method20189,862,007'Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein'2018Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2018–2021Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2018Based in Kumamoto, JP· patent location history
2021Based in Koshi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 3 | 2018–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kumamoto, JP | 2 | 2018 |
| Koshi, JP | 1 | 2021 |