Inventor
Thanh Huy Ha
Inventor
Milpitas, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
G06TImage data processing or generation, in general15%
G01NInvestigating or analysing materials by determining their chemical or physical properties12%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices12%
H01JElectric discharge tubes or discharge lamps12%
H01LSemiconductor devices8%
G02BOptical elements, systems or apparatus4%
G06FElectric digital data processing4%
G06KGraphical data reading4%
G06NComputing arrangements based on specific computational models4%
PatentTitleYear
10,790,114Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages202010,733,744Learning based approach for aligning images acquired with different modalities202010,670,535Automated pattern fidelity measurement plan generation202010,267,746Automated pattern fidelity measurement plan generation201910,062,543Determining multi-patterning step overlay error20189,483,819'Contour-based array inspection of patterned defects'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2020Patents assigned to KLA TENCOR CORP (6)· patent assignee history
2016–2020Based in Milpitas, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 6 | 2016–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Milpitas, California, US | 6 | 2016–2020 |