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Inventor

Mark S. Wanta

Inventor
Sunnyvale, CA, US

Overview

2→
Patents
1989–1997
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
G06TImage data processing or generation, in general33%
PatentTitleYear
5,621,813'Pattern recognition alignment system'19974,880,309'Dark field target design system for alignment of semiconductor wafers'1989

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1989Patents assigned to GEN SIGNAL CORP (1)· patent assignee history
1989Based in North Richland Hills, TX, US· patent location history
1997Patents assigned to ULTRATECH STEPPER INC (1)· patent assignee history
1997Based in Sunnyvale, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
GEN SIGNAL CORP11989
ULTRATECH STEPPER INC11997
Locations
LocationPatentsSpan
Sunnyvale, California, US11997
North Richland Hills, Texas, US11989