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Inventor

Shuhei Takagi

Inventor
Yokohama, JP

Overview

2→
Patents
1988
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
G01SRadio direction-finding33%
PatentTitleYear
4,789,242'Optical apparatus for detecting the position of an object'19884,723,846'Optical path length compensating optical system in an alignment apparatus'1988

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1988Patents assigned to NIKON CORP (1)· patent assignee history
1988Patents assigned to NIPPON KOGAKU KK (1)· patent assignee history
1988Based in Yokohama, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NIKON CORP11988
NIPPON KOGAKU KK11988
Locations
LocationPatentsSpan
Yokohama, JP21988