Inventor
Tetsuya Nishiara
Inventor
Yokohama, JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h10100%
PatentTitleYear
6,488,863'Plasma etching method'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2002Based in Yokohama, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 1 | 2002 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yokohama, JP | 1 | 2002 |