Inventor
SUNGWON HA
Inventor
US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
C23CCoating metallic material27%
H01LSemiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
B08BCleaning in general3%
H05BElectric heating3%
PatentTitleYear
12,400,843Chamber configurations and processes for particle control202512,211,673Processing chamber deposition confinement202512,191,169Systems and methods for faceplate temperature control202512,136,549Plasma-enhanced chemical vapor deposition of carbon hard-mask202412,000,048Pedestal for substrate processing chambers202411,875,969Process chamber with reduced plasma arc202411,699,577Treatment for high-temperature cleans202311,670,492Chamber configurations and processes for particle control202311,600,470Targeted heat control systems202311,584,994Pedestal for substrate processing chambers202311,515,129Radiation shield modification for improving substrate temperature uniformity202211,276,562Plasma processing using multiple radio frequency power feeds for improved uniformity2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to APPLIED MATERIALS INC (12)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 12 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 12 | 2022–2025 |