Inventor
Hiroyuki Takaba
Inventor
Tokyo, JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01JElectric discharge tubes or discharge lamps19%
C23CCoating metallic material14%
H01LSemiconductor devices14%
H10DInorganic electric semiconductor devices10%
B05DProcesses for applying fluent materials to surfaces, in general5%
B82YSpecific uses or applications of nanostructures5%
H10KOrganic electric solid-state devices5%
PatentTitleYear
9,721,803'Etching method for substrate to be processed and plasma-etching device'20179,293,346'Method for etching organic film and plasma etching device'20168,962,454'Method of depositing dielectric films using microwave plasma'20158,778,810'Plasma treatment method'20148,419,859'Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method'20138,399,366'Method of depositing highly conformal amorphous carbon films over raised features'20137,820,503'Semiconductor device and manufacturing method of the same'20107,511,338'Semiconductor device and manufacturing method of the same'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2017Patents assigned to TOKYO ELECTRON LTD (8)· patent assignee history
2009–2014Based in Tokyo, JP· patent location history
2013–2015Patents assigned to TAKABA HIROYUKI (4)· patent assignee history
2013Patents assigned to FUKIAGE NORIAKI (1)· patent assignee history
2013Patents assigned to ISHIBASHI KIYOTAKA (1)· patent assignee history
2013Patents assigned to KOMOTO SHINJI (1)· patent assignee history
2013Based in Hillsboro, OR, US· patent location history
2015Based in Portland, OR, US· patent location history
2016–2017Based in Miyagi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 8 | 2009–2017 |
| TAKABA HIROYUKIself | 4 | 2013–2015 |
| FUKIAGE NORIAKI | 1 | 2013 |
| ISHIBASHI KIYOTAKA | 1 | 2013 |
| KOMOTO SHINJI | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 4 | 2009–2014 |
| Miyagi, JP | 2 | 2016–2017 |
| Portland, OR, US | 1 | 2015 |
| Hillsboro, OR, US | 1 | 2013 |