Inventor
LEYI TU
Inventor
CN
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01LSemiconductor devices20%
H05HPlasma technique13%
H03HImpedance networks, e.g. resonant circuits7%
PatentTitleYear
12,087,548Plasma reactor202411,875,970Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatus202411,682,541Radio frequency power supply system, plasma processor, and frequency-tuning matching202311,626,314Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located202311,545,342Plasma processor and processing method2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2024Patents assigned to ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA (5)· patent assignee history
2023–2024Based in CN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA | 5 | 2023–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| CN | 5 | 2023–2024 |