LexDanaLexDanabeta
Inventor

Keping Han

Inventor
Beverly, MA, US

Overview

1→
Patents
2015
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
9,128,382'Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process'2015

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2015Patents assigned to LAM RES CORP (1)· patent assignee history
2015Based in Beverly, MA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CORP12015
Locations
LocationPatentsSpan
Beverly, Massachusetts, US12015