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Inventor

Shih-Yin Lan

Inventor
Hsinchu, TW

Overview

1→
Patents
1997
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
5,631,112'Multiple exposure method for photo-exposing photosensitive layers upon high step height topography substrate layers'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997Patents assigned to VANGUARD INT SEMICONDUCT CORP (1)· patent assignee history
1997Based in Hsinchu, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
VANGUARD INT SEMICONDUCT CORP11997
Locations
LocationPatentsSpan
Hsinchu, TW11997