Inventor
Klaus P. Thiel
Inventor
Boeblingen, DE
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
C30BSingle-crystal growth18%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests12%
B05CApparatus for applying fluent materials to surfaces, in general6%
H01LSemiconductor devices6%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation6%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution6%
PatentTitleYear
9,508,542'Arrangement for the production of structured substrates'20164,649,101'Process for the production of photoresist relief structures having an overhang character using o-quinone diazide photoresist with overexposure'19874,576,903'Developer for positive photoresists'19864,489,146'Reverse process for making chromium masks using silicon dioxide dry etch mask'19844,313,773'Method for removing borosilicate and boron rich oxides from a silicon body prior to doping silicon bodies with a SiB.sub.6 solid source'19824,249,970'Method of boron doping silicon bodies'19814,239,810'Method of making silicon photovoltaic cells'19804,206,026'Phosphorus diffusion process for semiconductors'1980Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1980–1984Patents assigned to IBM (5)· patent assignee history
1980–1982Based in Boeblingen, DE· patent location history
1984Based in Weiterstadt, DE· patent location history
1986–1987Patents assigned to MERCK PATENT GMBH (2)· patent assignee history
1986–1987Based in Brensbach, DE· patent location history
2016Patents assigned to RUMAILHA-COMERCIO INT E SERVICOS LDA & COMANDITA (1)· patent assignee history
2016Patents assigned to RUMAILHA-COMÉRCIO INT E SERVICOS LDA & COMANDITA (1)· patent assignee history
2016Based in Fischbachtal, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IBM | 5 | 1980–1984 |
| MERCK PATENT GMBH | 2 | 1986–1987 |
| RUMAILHA-COMERCIO INT E SERVICOS LDA & COMANDITA | 1 | 2016 |
| RUMAILHA-COMÉRCIO INT E SERVICOS LDA & COMANDITA | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Boeblingen, DE | 4 | 1980–1982 |
| Brensbach, DE | 2 | 1986–1987 |
| Fischbachtal, DE | 1 | 2016 |
| Weiterstadt, DE | 1 | 1984 |