Inventor
Darrell Ehrlich
Inventor
San Jose, CA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01LSemiconductor devices20%
H01JElectric discharge tubes or discharge lamps16%
C23CCoating metallic material12%
Y10TTechnical subjects covered by former us classification12%
H05BElectric heating8%
G01KMeasuring temperature4%
H05KPrinted circuits4%
PatentTitleYear
10,764,966Laminated heater with different heater trace materials202010,667,379Connections between laminated heater and heater voltage inputs202010,622,195Multi zone gas injection upper electrode system202010,332,729Compression member for use in showerhead electrode assembly201910,186,437Substrate holder having integrated temperature measurement electrical devices20199,922,804'Compression member for use in showerhead electrode assembly'20189,058,960'Compression member for use in showerhead electrode assembly'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2020Patents assigned to LAM RES CORP (7)· patent assignee history
2015–2020Patents assigned to EHRLICH DARRELL (2)· patent assignee history
2015Patents assigned to BROWN DANIEL ARTHUR (1)· patent assignee history
2015–2020Based in San Jose, CA, US· patent location history
2020Patents assigned to BAILEY III ANDREW D (1)· patent assignee history
2020Patents assigned to BISE RYAN (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 7 | 2015–2020 |
| EHRLICH DARRELLself | 2 | 2015–2020 |
| BAILEY III ANDREW D | 1 | 2020 |
| BISE RYAN | 1 | 2020 |
| BROWN DANIEL ARTHUR | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 7 | 2015–2020 |