Inventor

Anthony C. Bonora

Inventor

Menlo Park, CA, US

Overview

1976–2021

Patent span

Electricity

Primary field (CPC H)

Patents· 99 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests24%

B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors9%

H01LSemiconductor devices6%

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%

Y10TTechnical subjects covered by former us classification4%

B25JManipulators3%

B07CPostal sorting1%

B24BMachines, devices, or processes for grinding or polishing1%

G01NInvestigating or analysing materials by determining their chemical or physical properties1%

PatentTitleYear

11,077,466End effector with slides for transferring trays2021 10,755,960Wafer aligner2020 10,661,990Automated cryogenic storage system2020 10,593,583Integrated systems for interfacing with substrate container storage systems2020 10,549,420Over and under linear axis robot2020 10,434,661Workpiece support structures and apparatus for accessing same2019 10,336,539Automated cryogenic storage system2019 10,092,929Wafer tray sorter with door coupled to detector2018 9,878,453'Workpiece structures and apparatus for accessing same'2018 9,842,756'Integrated systems for interfacing with substrate container storage systems'2017 9,834,378Loader and buffer for reduced lot size2017 9,545,724'Tray engine with slide attached to an end effector base'2017 9,378,995'Port door positioning apparatus and associated methods'2016 9,376,958'Point-of-use electricity generation system'2016 9,275,885'Horizontal displacement mechanism for cleanroom material transfer systems'2016 9,190,304'Dynamic storage and transfer system integrated with autonomous guided/roving vehicle'2015 9,184,078'Narrow width loadport mechanism for cleanroom material transfer systems'2015 8,882,433'Integrated systems for interfacing with substrate container storage systems'2014 8,870,516'Port door positioning apparatus and associated methods'2014 8,851,820'Substrate container storage system'2014 8,851,817'Universal modular wafer transport system'2014 8,800,774'Workpiece support structures and apparatus for accessing same'2014 7,841,820'Universal modular wafer transport system'2010 7,798,759'Modular terminal for high-throughput AMHS'2010 7,784,606'Belt conveyor transporting containers used in semiconductor fabrication'2010 7,771,151'Interface between conveyor and semiconductor process tool load port'2010 7,737,567'Method and apparatus for wafer marking'2010 7,669,903'Ultra low contact area end effector'2010 7,661,919'Discontinuous conveyor system'2010 7,651,307'Direct tool loading'2010 7,648,327'Wafer engine'2010 7,597,523'Variable lot size load port'2009 7,585,144'Variable lot size load port'2009 7,472,788'Belt conveyor for use with semiconductor containers'2009 7,445,415'Direct tool loading'2008 7,410,340'Direct tool loading'2008 7,293,811'Ultra low contact area end effector'2007 7,293,950'Universal modular wafer transport system'2007 7,290,813'Active edge grip rest pad'2007 7,217,076'Semiconductor material handling system'2007 7,100,340'Unified frame for semiconductor material handling system'2006 7,066,707'Wafer engine'2006 7,055,875'Ultra low contact area end effector'2006 6,704,998'Port door removal and wafer handling robotic system'2004 6,663,148'System for preventing improper insertion of FOUP door into FOUP'2003 6,634,851'Workpiece handling robot'2003 6,623,051'Laterally floating latch hub assembly'2003 6,612,797'Cassette buffering within a minienvironment'2003 6,579,052'SMIF pod storage, delivery and retrieval system'2003 6,575,687'Wafer transport system'2003 6,533,101'Integrated transport carrier and conveyor system'2003 6,494,308'Integrated roller transport pod and asynchronous conveyor'2002 6,481,558'Integrated load port-conveyor transfer system'2002 6,468,021'Integrated intra-bay transfer, storage, and delivery system'2002 6,435,330'In/out load port transfer mechanism'2002 6,398,032'SMIF pod including independently supported wafer cassette'2002 6,364,595'Reticle transfer system'2002 6,318,953'SMIF-compatible open cassette enclosure'2001 6,308,818'Transport system with integrated transport carrier and directors'2001 6,298,280'Method for in-cassette wafer center determination'2001 6,223,886'Integrated roller transport pod and asynchronous conveyor'2001 6,220,808'Ergonomic, variable size, bottom opening system compatible with a vertical interface'2001 6,188,323'Wafer mapping system'2001 6,138,721'Tilt and go load port interface alignment system'2000 6,135,698'Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications'2000 5,988,233'Evacuation-driven SMIF pod purge system'1999 5,944,475'Rotated, orthogonal load compatible front-opening interface'1999 5,931,631'Method and apparatus for vertical transfer of a semiconductor wafer cassette'1999 5,895,191'Sealable, transportable container adapted for horizontal loading and unloading'1999 5,846,338'Method for dry cleaning clean room containers'1998 5,810,062'Two stage valve for charging and/or vacuum relief of pods'1998 5,788,458'Method and apparatus for vertical transfer of a semiconductor wafer cassette'1998 5,740,845'Sealable, transportable container having a breather assembly'1998 5,653,565'SMIF port interface adaptor'1997 5,611,452'Sealable transportable container having improved liner'1997 5,586,585'Direct loadlock interface'1996 5,570,990'Human guided mobile loader stocker'1996 5,547,328'Method and apparatus for transferring articles between two controlled environments'1996 5,469,963'Sealable transportable container having improved liner'1995 5,370,491'Method and apparatus for transferring articles between two controlled environments'1994 5,169,272'Method and apparatus for transferring articles between two controlled environments'1992 5,166,884'Intelligent system for processing and storing articles'1992 5,097,421'Intelligent waxer carrier'1992 4,995,430'Sealable transportable container having improved latch mechanism'1991 4,974,166'Processing systems with intelligent article tracking'1990 4,918,870'Floating subcarriers for wafer polishing apparatus'1990 4,859,137'Apparatus for transporting a holder between a port opening of a standardized mechanical interface system and a loading and unloading station'1989 4,802,809'Manipulator for standard mechanical interface apparatus'1989 4,739,882'Container having disposable liners'1988 4,724,874'Sealable transportable container having a particle filtering system'1988 4,676,709'Long arm manipulator for standard mechanical interface apparatus'1987 4,674,936'Short arm manipulator for standard mechanical interface apparatus'1987 4,458,152'Precision specular proximity detector and article handing apparatus employing same'1984 4,454,096'Crystal growth furnace recharge'1984 4,194,324'Semiconductor wafer polishing machine and wafer carrier therefor'1980 4,132,037'Apparatus for polishing semiconductor wafers'1979 4,077,485'Vehicle battery mounting apparatus'1978 4,026,574'Combination kickstand and footrest'1977 3,998,598'Automatic diameter control for crystal growing facilities'1976

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1979–1990Patents assigned to SILTEC CORP (5)· patent assignee history

1979–1984Based in Atherton, CA, US· patent location history

1987–2009Patents assigned to ASYST TECHNOLOGIES (58)· patent assignee history

1987–2004Based in Menlo Park, CA, US· patent location history

2003–2014Based in Woodside, CA, US· patent location history

2008–2021Based in Portola Valley, CA, US· patent location history

2010Patents assigned to MURATEC AUTOMATION CO LTD (5)· patent assignee history

2010–2019Based in Fremont, CA, US· patent location history

2014–2021Patents assigned to BROOKS AUTOMATION INC (20)· patent assignee history

2014–2017Patents assigned to BONORA ANTHONY C (9)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
ASYST TECHNOLOGIES	58	1987–2009
BROOKS AUTOMATION INC	20	2014–2021
BONORA ANTHONY Cself	9	2014–2017
MURATEC AUTOMATION CO LTD	5	2010
SILTEC CORP	5	1979–1990

Locations

Location	Patents	Span
Menlo Park, California, US	46	1987–2004
Portola Valley, California, US	28	2008–2021
Woodside, California, US	14	2003–2014
Fremont, California, US	4	2010–2019
Atherton, California, US	4	1979–1984