Inventor
Daniel Gene Smith
Inventor
Tucson, AZ, US
Overview
Patents· 39 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices26%
G01BMeasuring length, thickness or similar linear dimensions22%
G02BOptical elements, systems or apparatus20%
G01SRadio direction-finding14%
G01DMeasuring not specially adapted for a specific variable4%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light4%
F21VFunctional features or details of lighting devices or systems thereof2%
G01NInvestigating or analysing materials by determining their chemical or physical properties2%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them2%
B23KSoldering or unsoldering1%
PatentTitleYear
11,029,595Mask assembly and associated methods202110,837,763Optical assembly, method for producing data in the same, and method for manufacturing structure202010,794,689Autofocus system and method202010,747,117Extreme ultraviolet lithography system that utilizes pattern stitching202010,719,017Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror202010,690,317Illumination device for optimizing polarization in an illumination pupil202010,295,911Extreme ultraviolet lithography system that utilizes pattern stitching201910,197,668Eighth wave corner cube retarder for laser radar201910,180,496Laser radar with remote local oscillator201910,139,492Radar systems with dual fiber coupled lasers20189,977,343Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror20189,964,745Compact laser radar corner cube20189,864,204'High order focus in laser radar tooling ball measurements'20189,816,805'Compensation for Goos-Hanchen error in autofocus systems'20179,810,530'Autofocus system and method'20179,732,934'Illumination device for optimizing polarization in an illumination pupil'20179,638,799'Scan mirrors for laser radar'20179,625,368'Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure'20179,618,619'Radar systems with dual fiber coupled lasers'20179,587,977'Boresight error monitor for laser radar integrated optical assembly'20179,360,347'Two-dimensional encoder system and method'20169,335,159'Methods and devices for reducing errors in Goos-Hänchen corrections of displacement data'20169,243,901'Rules for reducing the sensitivity of fringe projection autofocus to air temperature changes'20169,213,227'Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system'20159,097,851'System and method for compensating instability in an autofocus system'20159,091,941'Fast illumination simulator based on a calibrated flexible point-spread function'20159,074,911'Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects'20159,030,668'Method for spatially multiplexing two or more fringe projection signals on a single detector'20158,842,296'Methods and devices for reducing errors in Goos-Hänchen corrections of displacement data'20148,829,420'Two dimensional encoder system and method'20148,820,948'Compound parabolic collectors for projection lens metrology'20148,736,813'Exposure apparatus with an illumination system generating multiple illumination beams'20148,724,095'Optical assembly for laser radar'20148,582,119'Large scale metrology apparatus and method'20138,422,027'Imaging optical system for producing control information regarding lateral movement of an image plane or an object plane'20138,317,344'High NA annular field catoptric projection optics using Zernike polynomial mirror surfaces'20128,116,342'Variable attenuator device and method'20127,982,884'Autofocus system with error compensation'20117,612,892'Imaging optical system configured with through the lens optics for producing control information'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2020Patents assigned to NIKON CORP (37)· patent assignee history
2009–2014Based in Oro Valley, AZ, US· patent location history
2011–2020Based in Tucson, AZ, US· patent location history
2012–2013Patents assigned to SMITH DANIEL G (3)· patent assignee history
2013–2017Patents assigned to SMITH DANIEL GENE (8)· patent assignee history
2014–2017Patents assigned to GOODWIN ERIC PETER (6)· patent assignee history
2017–2019Patents assigned to NIKON METROLOGY NV (4)· patent assignee history
2021Based in Eindhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NIKON CORP | 37 | 2009–2020 |
| SMITH DANIEL GENEself | 8 | 2013–2017 |
| GOODWIN ERIC PETER | 6 | 2014–2017 |
| NIKON METROLOGY NV | 4 | 2017–2019 |
| SMITH DANIEL Gself | 3 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tucson, AZ, US | 35 | 2011–2020 |
| Oro Valley, AZ, US | 3 | 2009–2014 |
| Eindhoven, NL | 1 | 2021 |