Inventor
Herbert H. Sawin
Inventor
Chestnut Hill, MA, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01JElectric discharge tubes or discharge lamps14%
C23FNon-mechanical removal of metallic material from surface11%
B05DProcesses for applying fluent materials to surfaces, in general8%
C23CCoating metallic material8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
Y10TTechnical subjects covered by former us classification8%
B08BCleaning in general3%
G01BMeasuring length, thickness or similar linear dimensions3%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
PatentTitleYear
7,037,846'Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing'20066,761,796'Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing'20046,740,247'HF vapor phase wafer cleaning and oxide etching'20046,183,566'UV/halogen metals removal process'20016,156,435'Chemical vapor deposition of fluorocarbon polymer thin films'20006,153,269'Chemical vapor deposition of fluorocarbon polymer thin films'20006,153,115'Monitor of plasma processes with multivariate statistical analysis of plasma emission spectra'20006,107,166'Vapor phase cleaning of alkali and alkaline earth metals'20006,083,413'Metals removal process'20005,954,884'UV/halogen metals removal process'19995,888,591'Chemical vapor deposition of fluorocarbon polymer thin films'19995,450,205'Apparatus and method for real-time measurement of thin film layer thickness and changes thereof'19955,061,838'Toroidal electron cyclotron resonance reactor'1991Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1991–2004Patents assigned to MASSACHUSETTS INST TECHNOLOGY (11)· patent assignee history
1991Based in Lexington, MA, US· patent location history
1995Based in Arlington, MA, US· patent location history
1999–2001Patents assigned to FSI INT INC (3)· patent assignee history
1999–2006Based in Chestnut Hill, MA, US· patent location history
2004–2006Patents assigned to AXCELIS TECH INC (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MASSACHUSETTS INST TECHNOLOGY | 11 | 1991–2004 |
| FSI INT INC | 3 | 1999–2001 |
| AXCELIS TECH INC | 2 | 2004–2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Chestnut Hill, Massachusetts, US | 11 | 1999–2006 |
| Arlington, Massachusetts, US | 1 | 1995 |
| Lexington, Massachusetts, US | 1 | 1991 |