Inventor
Takayoshi Oosakaya
Inventor
Iruma, JP
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
5,432,608'Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same'19955,260,771'Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same'19935,094,539'Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same'1992Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1992–1995Patents assigned to HITACHI LTD (3)· patent assignee history
1992–1995Based in Iruma, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 3 | 1992–1995 |
Locations
| Location | Patents | Span |
|---|---|---|
| Iruma, JP | 3 | 1992–1995 |