Inventor
MASAYUKI TOMOYASU
Inventor
KR
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H01LSemiconductor devices20%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling10%
H02NElectric machines not otherwise provided for10%
PatentTitleYear
11,837,496Substrate processing apparatus and method of processing a substrate202311,817,298Focus ring, chuck assembly for securing a substrate and plasma treatment apparatus having the same202311,450,545Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2023Patents assigned to SAMSUNG ELECTRONICS CO LTD (3)· patent assignee history
2022–2023Based in KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 3 | 2022–2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 3 | 2022–2023 |