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Inventor

Kyung-Jin Chu

Inventor
Suwon-si, KR

Overview

2→
Patents
2019–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
Y10TTechnical subjects covered by former us classification25%
PatentTitleYear
10,622,228Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit202010,192,760Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit2019

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2019–2020Patents assigned to EUGENE TECHNOLOGY CO LTD (2)· patent assignee history
2019–2020Based in Suwon-si, KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
EUGENE TECHNOLOGY CO LTD22019–2020
Locations
LocationPatentsSpan
Suwon-si, KR22019–2020