Inventor
Scott L. Battle
Inventor
Cedar Park, TX, US
Overview
Patents· 21 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material27%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
F17CVessels for containing or storing compressed, liquefied or solidified gases11%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution9%
C07FAcyclic, carbocyclic or heterocyclic compounds containing elements other than carbon, hydrogen, halogen, oxygen, nitrogen, sulfur, selenium or tellurium7%
B01FMixing, e.g. dissolving, emulsifying or dispersing4%
C09DCoating compositions, e.g. paints, varnishes or lacquers4%
C01GCompounds containing metals not covered by subclasses c01d or c01f3%
B01BBoiling1%
PatentTitleYear
10,895,010Solid precursor-based delivery of fluid utilizing controlled solids morphology202110,895,347Heat transfer to ampoule trays202110,526,697High-purity tungsten hexacarbonyl for solid source delivery202010,465,286Method and apparatus to help promote contact of gas with vaporized material201910,392,700Solid vaporizer201910,385,452Source reagent-based delivery of fluid with high material flux for batch deposition20199,997,362Cobalt CVD20189,637,395'Fluorine free tungsten ALD/CVD process'20179,469,898'Method and apparatus to help promote contact of gas with vaporized material'20169,004,462'Method and apparatus to help promote contact of gas with vaporized material'20158,821,640'Solid precursor-based delivery of fluid utilizing controlled solids morphology'20148,444,120'Method and apparatus to help promote contact of gas with vaporized material'20138,128,073'Method and apparatus to help promote contact of gas with vaporized material'20128,053,375'Super-dry reagent compositions for formation of ultra low k films'20117,828,274'Method and apparatus to help promote contact of gas with vaporized material'20107,556,244'Method and apparatus to help promote contact of gas with vaporized material'20097,487,956'Method and apparatus to help promote contact of gas with vaporized material'20097,300,038'Method and apparatus to help promote contact of gas with vaporized material'20077,108,771'Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin films'20066,921,062'Vaporizer delivery ampoule'20056,458,984'Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS)'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2015Patents assigned to ADVANCED TECH MATERIALS (12)· patent assignee history
2002–2021Based in Cedar Park, TX, US· patent location history
2012–2014Patents assigned to GREGG JOHN N (3)· patent assignee history
2012–2013Patents assigned to BANTON JEFFREY I (2)· patent assignee history
2012–2013Patents assigned to BATTLE SCOTT L (2)· patent assignee history
2015–2021Patents assigned to ENTEGRIS INC (10)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ADVANCED TECH MATERIALS | 12 | 2002–2015 |
| ENTEGRIS INC | 10 | 2015–2021 |
| GREGG JOHN N | 3 | 2012–2014 |
| BANTON JEFFREY I | 2 | 2012–2013 |
| BATTLE SCOTT Lself | 2 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Cedar Park, Texas, US | 21 | 2002–2021 |