Inventor
Pedro Vagos
Inventor
Chennevieres, FR
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties29%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light12%
G06FElectric digital data processing12%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
G01BMeasuring length, thickness or similar linear dimensions6%
PatentTitleYear
10,621,264Correction of angular error of plane-of-incidence azimuth of optical metrology device202010,296,554Correction of angular error of plane-of-incidence azimuth of optical metrology device201910,274,367Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device20199,995,689Optical metrology using differential fitting20189,958,327Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device20188,427,645'Mueller matrix spectroscopy using chiroptic'20137,751,061'Non-contact apparatus and method for measuring a property of a dielectric layer on a wafer'20107,410,815'Apparatus and method for non-contact assessment of a constituent in semiconductor substrates'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2019Patents assigned to NANOMETRICS INC (7)· patent assignee history
2008–2010Based in Bend, OR, US· patent location history
2013Patents assigned to ROVIRA PABLO I (1)· patent assignee history
2013Patents assigned to VAGOS PEDRO (1)· patent assignee history
2013–2020Based in Chennevieres, FR· patent location history
2020Patents assigned to ONTO INNOVATION INC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NANOMETRICS INC | 7 | 2008–2019 |
| ONTO INNOVATION INC | 1 | 2020 |
| ROVIRA PABLO I | 1 | 2013 |
| VAGOS PEDROself | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Chennevieres, FR | 6 | 2013–2020 |
| Bend, OR, US | 2 | 2008–2010 |