Inventor
Kimio Hagi
Inventor
Hyogo, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Wprimary
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1045%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form9%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling5%
H02NElectric machines not otherwise provided for5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
PatentTitleYear
6,778,377'Electrostatic chucking system, and apparatus and method of manufacturing a semiconductor device using the electrostatic chucking system'20046,414,395'Semiconductor device capable of preventing disconnection in a through hole'20026,304,001'Semiconductor device with alignment mark and manufacturing method thereof'20015,889,330'Semiconductor device whose flattening resin film component has a controlled carbon atom content'19995,859,478'Semiconductor device including a main alignment mark having peripheral minute alignment marks'19995,728,630'Method of making a semiconductor device'19985,604,380'Semiconductor device having a multilayer interconnection structure'19975,565,378'Process of passivating a semiconductor device bonding pad by immersion in O.sub.2 or O.sub.3 solution'19965,480,836'Method of forming an interconnection structure'19965,341,026'Semiconductor device having a titanium and a titanium compound multilayer interconnection structure'19945,306,947'Semiconductor device and manufacturing method thereof'1994Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1994–2002Patents assigned to MITSUBISHI ELECTRIC CORP (10)· patent assignee history
1994–2002Based in Hyogo, JP· patent location history
1999–2004Based in Tokyo, JP· patent location history
2004Patents assigned to RENESAS TECH CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MITSUBISHI ELECTRIC CORP | 10 | 1994–2002 |
| RENESAS TECH CORP | 1 | 2004 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hyogo, JP | 9 | 1994–2002 |
| Tokyo, JP | 2 | 1999–2004 |