Inventor
Daniel C. Baker
Inventor
Milpitas, CA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices53%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1012%
G02BOptical elements, systems or apparatus6%
PatentTitleYear
6,818,064'Photoresist dispense arrangement by compensation for substrate reflectivity'20046,433,854'Method of illumination uniformity in photolithographic systems'20026,411,367'Modified optics for imaging of lens limited subresolution features'20026,319,735'Photoresist dispense method by compensation for substrate reflectivity'20016,313,542'Method and apparatus for detecting edges under an opaque layer'20016,274,940'Semiconductor wafer, a chemical-mechanical alignment mark, and an apparatus for improving alignment for metal masking in conjunction with oxide and tungsten CMP'20016,262,795'Apparatus and method for the improvement of illumination uniformity in photolithographic systems'20016,162,586'Method for substantially preventing footings in chemically amplified deep ultra violet photoresist layers'20005,952,241'Method and apparatus for improving alignment for metal masking in conjuction with oxide and tungsten CMP'19995,952,135'Method for alignment using multiple wavelengths of light'19995,852,497'Method and apparatus for detecting edges under an opaque layer'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2002Patents assigned to VLSI TECHNOLOGY INC (5)· patent assignee history
1998–2004Based in Milpitas, CA, US· patent location history
2000Patents assigned to PHILIPS ELECTRONICS NA (1)· patent assignee history
2001Patents assigned to PHILIP SEMICONDUCTORS INC (1)· patent assignee history
2001Patents assigned to PHILIPS SEMICONDUCTOR INC (1)· patent assignee history
2002–2004Patents assigned to KONINKL PHILIPS ELECTRONICS NV (2)· patent assignee history
2002Based in San Jose, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VLSI TECHNOLOGY INC | 5 | 1998–2002 |
| KONINKL PHILIPS ELECTRONICS NV | 2 | 2002–2004 |
| PHILIP SEMICONDUCTORS INC | 1 | 2001 |
| PHILIPS ELECTRONICS NA | 1 | 2000 |
| PHILIPS SEMICONDUCTOR INC | 1 | 2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| Milpitas, California, US | 10 | 1998–2004 |
| San Jose, California, US | 1 | 2002 |