Inventor
Atsuhiko Suda
Inventor
Toyama, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H01LSemiconductor devices14%
H01JElectric discharge tubes or discharge lamps11%
H10DInorganic electric semiconductor devices7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
B41MPrinting, duplicating, marking, or copying processes4%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%
Y10TTechnical subjects covered by former us classification4%
PatentTitleYear
9,735,068'Method of manufacturing semiconductor device'20179,666,494'Method of manufacturing semiconductor device'20179,431,220'Substrate processing apparatus and substrate processing system'20169,355,866'Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium'20168,641,829'Substrate processing system'20148,506,714'Substrate processing system'20138,240,271'Substrate processing apparatus'20127,981,815'Semiconductor device producing method and substrate processing apparatus'20116,053,980'Substrate processing apparatus'20005,772,770'Substrate processing apparatus'19985,480,702'Article having indicia-receiving layer'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996Based in Kyoto, JP· patent location history
1998–2000Patents assigned to KOKUSAI ELECTRIC CO LTD (2)· patent assignee history
1998–2000Based in Tokyo, JP· patent location history
2011–2017Patents assigned to HITACHI INT ELECTRIC INC (8)· patent assignee history
2011–2017Based in Toyama, JP· patent location history
2012–2013Patents assigned to SUDA ATSUHIKO (2)· patent assignee history
2013Patents assigned to HIRAHARA KAZUHIRO (1)· patent assignee history
2016Patents assigned to HITACHI KOKUSAI ELECETRIC INC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI INT ELECTRIC INC | 8 | 2011–2017 |
| KOKUSAI ELECTRIC CO LTD | 2 | 1998–2000 |
| SUDA ATSUHIKOself | 2 | 2012–2013 |
| HIRAHARA KAZUHIRO | 1 | 2013 |
| HITACHI KOKUSAI ELECETRIC INC | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Toyama, JP | 8 | 2011–2017 |
| Tokyo, JP | 2 | 1998–2000 |
| Kyoto, JP | 1 | 1996 |