Inventor
Shao Beng Law
Inventor
Watervliet, NY, US
Overview
Patents· 19 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices35%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1033%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
C23CCoating metallic material2%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices2%
H05KPrinted circuits2%
H10DInorganic electric semiconductor devices2%
Y10TTechnical subjects covered by former us classification2%
PatentTitleYear
10,770,392Line end structures for semiconductor devices202010,741,495Structure and method to reduce shorts and contact resistance in semiconductor devices202010,636,656Methods of protecting structure of integrated circuit from rework202010,627,720Overlay mark structures202010,573,593Metal interconnects for super (skip) via integration202010,485,111Via and skip via structures201910,395,926Multiple patterning with mandrel cuts formed using a block mask201910,236,256Pre-spacer self-aligned cut formation201910,199,261Via and skip via structures201910,163,633Non-mandrel cut formation201810,109,526Etch profile control during skip via formation201810,056,291Post spacer self-aligned cuts201810,056,292Self-aligned lithographic patterning201810,026,687Metal interconnects for super (skip) via integration201810,014,297Methods of forming integrated circuit structure using extreme ultraviolet photolithography technique and related integrated circuit structure20189,966,338Pre-spacer self-aligned cut formation20189,905,424'Self-aligned non-mandrel cut formation for tone inversion'20189,805,972'Skip via structures'20178,177,993'Apparatus and methods for cleaning and drying of wafers'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012Patents assigned to GLOBALFOUNDRIES SG PTE LTD (1)· patent assignee history
2012Patents assigned to HSIA LIANG CHOO (1)· patent assignee history
2012Patents assigned to JOY RAYMOND (1)· patent assignee history
2012Patents assigned to LAW SHAO BENG (1)· patent assignee history
2012Based in Singapore, SG· patent location history
2017–2020Patents assigned to GLOBALFOUNDRIES INC (18)· patent assignee history
2017–2020Based in Watervliet, NY, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GLOBALFOUNDRIES INC | 18 | 2017–2020 |
| GLOBALFOUNDRIES SG PTE LTD | 1 | 2012 |
| HSIA LIANG CHOO | 1 | 2012 |
| JOY RAYMOND | 1 | 2012 |
| LAW SHAO BENGself | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Watervliet, New York, US | 18 | 2017–2020 |
| Singapore, SG | 1 | 2012 |