Inventor
KENJI YAEGASHI
Inventor
JP
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices43%
B29CShaping or joining of plastics14%
G01BMeasuring length, thickness or similar linear dimensions14%
G02BOptical elements, systems or apparatus14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
PatentTitleYear
12,481,228Object alignment method, imprint method, article manufacturing method, detection apparatus, imprint apparatus, mold, and substrate202511,673,313Imprint apparatus and article manufacturing method202311,181,363Measurement device, imprint apparatus, method for manufacturing product, light amount determination method, and light amount adjustment method2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to CANON KK (3)· patent assignee history
2021–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 3 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 3 | 2021–2025 |