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Inventor

Yasuhito Saiga

Inventor
Minato-ku, JP

Overview

8→
Patents
2010–2014
Patent span
Physics
Primary field (CPC G)

Patents· 8 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests15%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them5%
H01LSemiconductor devices5%
H10DInorganic electric semiconductor devices5%
PatentTitleYear
8,889,337'Film forming method, film forming apparatus and pattern forming method'20148,702,370'Substrate transfer method for performing processes including photolithography sequence'20148,236,132'Substrate processing system and substrate transfer method'20128,133,663'Pattern forming method and apparatus'20128,007,968'Substrate processing method, program, computer-readable storage medium and substrate processing system'20117,901,149'Substrate processing method, program, computer-readable recording medium, and substrate processing system'20117,826,032'Circulation system for high refractive index liquid in pattern forming apparatus'20107,651,285'Edge exposure apparatus, coating and developing apparatus, edge exposure method and coating and developing method, and storage medium'2010

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2010–2014Patents assigned to TOKYO ELECTRON LTD (8)· patent assignee history
2010–2014Based in Tokyo, JP· patent location history
2011–2014Based in Minato-ku, JP· patent location history
2012–2014Patents assigned to SAIGA YASUHITO (4)· patent assignee history
2012–2014Patents assigned to YAMADA YOSHIAKI (4)· patent assignee history
2012–2014Patents assigned to KOSUGI HITOSHI (2)· patent assignee history
2012–2014Patents assigned to YAMAGUCHI TADAYUKI (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD82010–2014
SAIGA YASUHITOself42012–2014
YAMADA YOSHIAKI42012–2014
KOSUGI HITOSHI22012–2014
YAMAGUCHI TADAYUKI22012–2014
Locations
LocationPatentsSpan
Minato-ku, JP52011–2014
Tokyo, JP32010–2014