Inventor
Aleksandar Nikolov Zdravkov
Inventor
Eindhoven, NL
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices80%
G02BOptical elements, systems or apparatus20%
PatentTitleYear
10,928,722Method of manufacturing a membrane assembly for EUV lithography, a membrane assembly, a lithographic apparatus, and a device manufacturing method202110,908,496Membrane for EUV lithography202110,571,810Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus202010,317,804Substrate table, lithographic apparatus and method of operating a lithographic apparatus2019Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2019–2021Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2019–2021Based in Eindhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 4 | 2019–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 4 | 2019–2021 |