Inventor
Yun-Kwang Jeon
Inventor
Seoul, KR
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01JElectric discharge tubes or discharge lamps23%
H01LSemiconductor devices23%
B01DSeparation6%
H02NElectric machines not otherwise provided for6%
A47GHousehold or table equipment3%
G01BMeasuring length, thickness or similar linear dimensions3%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light3%
G21KHandling of particles or ionising radiation not otherwise provided for3%
H04NPictorial communication, e.g. television3%
PatentTitleYear
10,861,724Substrate inspection apparatus and substrate processing system including the same202010,854,485Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same202010,566,221Apparatus for transferring substrate and apparatus for processing substrate including the same202010,522,374Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same201910,481,005Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same201910,395,900Plasma processing apparatus201910,229,818Apparatus for monitoring process chamber201910,224,228Electrostatic chucks and substrate processing apparatus including the same201910,103,043Apparatus for transferring substrate and apparatus for processing substrate including the same20187,285,788'Ion beam extractor'20077,282,702'Ion neutralizer'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2020Patents assigned to SAMSUNG ELECTRONICS CO LTD (11)· patent assignee history
2007–2020Based in Seoul, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 11 | 2007–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Seoul, KR | 11 | 2007–2020 |