Inventor

KOICHI NAGAMI

Inventor

JP

Overview

2022–2026

Patent span

Electricity

Primary field (CPC H)

Patents· 19 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary

H01JElectric discharge tubes or discharge lamps45%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%

H01LSemiconductor devices10%

H05HPlasma technique7%

H01HElectric switches5%

H03HImpedance networks, e.g. resonant circuits5%

B08BCleaning in general2%

C23CCoating metallic material2%

H10DInorganic electric semiconductor devices2%

PatentTitleYear

12,537,168Plasma processing method and plasma processing apparatus2026 12,537,172Plasma processing method and plasma processing apparatus2026 12,437,970Plasma processing method and plasma processing apparatus2025 12,400,832Plasma processing apparatus and plasma processing method2025 12,261,027Plasma processing apparatus and plasma processing method2025 12,255,049Plasma processing apparatus and plasma processing method2025 12,243,723Plasma processing apparatus2025 12,154,793Etching apparatus and etching method2024 12,136,535Plasma processing apparatus and plasma processing method2024 12,033,833Filter circuit and plasma processing apparatus2024 12,033,832Plasma processing method and plasma processing apparatus2024 11,887,817Plasma processing apparatus and plasma processing method2024 11,776,795Plasma processing apparatus and power supply control method2023 11,764,034Plasma processing method and plasma processing apparatus2023 11,764,082Control method and plasma processing apparatus2023 11,646,181Plasma processing apparatus and plasma processing method2023 11,594,398Apparatus and method for plasma processing2023 11,387,077Plasma processing method and plasma processing apparatus2022 11,251,048Plasma processing method and plasma processing apparatus2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2026Patents assigned to TOKYO ELECTRON LTD (19)· patent assignee history

2022–2026Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
TOKYO ELECTRON LTD	19	2022–2026

Locations

Location	Patents	Span
JP	19	2022–2026