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Inventor

Chih-Mihg Ke

Inventor
Hsinchu, TW

Overview

2→
Patents
2015–2021
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Jprimary
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light20%
G01NInvestigating or analysing materials by determining their chemical or physical properties20%
G01RMeasuring electric variables20%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
G06FElectric digital data processing20%
PatentTitleYear
10,983,005Spectroscopic overlay metrology20218,984,450'Method and apparatus for extracting systematic defects'2015

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2015Patents assigned to TAIWAN SEMICONDUCTOR MFG (1)· patent assignee history
2015–2021Based in Hsinchu, TW· patent location history
2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG12015
TAIWAN SEMICONDUCTOR MFG CO LTD12021
Locations
LocationPatentsSpan
Hsinchu, TW22015–2021