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Inventor

Jeffrey A. Burgess

Inventor
Manchester, MA, US

Overview

5→
Patents
2003–2018
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps71%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests14%
PatentTitleYear
10,153,127Low profile extraction electrode assembly20189,818,575'Low profile extraction electrode assembly'20177,559,557'Sealing between vacuum chambers'20096,984,831'Gas flow restricting cathode system for ion implanter and related method'20066,525,326'System and method for removing particles entrained in an ion beam'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003Patents assigned to AXCELIS TECH INC (1)· patent assignee history
2003–2009Based in Manchester, MA, US· patent location history
2006–2009Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (2)· patent assignee history
2017–2018Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (2)· patent assignee history
2017–2018Based in Manchester-by-the-Sea, MA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
VARIAN SEMICONDUCTOR EQUIPMENT22006–2009
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC22017–2018
AXCELIS TECH INC12003
Locations
LocationPatentsSpan
Manchester, Massachusetts, US32003–2009
Manchester-by-the-Sea, Massachusetts, US22017–2018