Inventor
Peter David Engblom
Inventor
Portland, OR, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices63%
G01BMeasuring length, thickness or similar linear dimensions25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
PatentTitleYear
10,901,330Recipe selection based on inter-recipe consistency202110,394,137Inspection method, lithographic apparatus, mask and substrate201910,338,484Recipe selection based on inter-recipe consistency201910,001,711Inspection method, lithographic apparatus, mask and substrate20189,280,064'Lithographic method and apparatus'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2021Patents assigned to ASML NETHERLANDS BV (5)· patent assignee history
2016Patents assigned to DE WINTER LAURENTIUS CORNELIUS (1)· patent assignee history
2016Patents assigned to ENGBLOM PETER DAVID (1)· patent assignee history
2016Patents assigned to KÖHLER CARSTEN ANDREAS (1)· patent assignee history
2016Patents assigned to STAALS FRANK (1)· patent assignee history
2016Based in Meridian, ID, US· patent location history
2018–2019Based in Hillsboro, OR, US· patent location history
2019–2021Based in Portland, OR, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 5 | 2016–2021 |
| DE WINTER LAURENTIUS CORNELIUS | 1 | 2016 |
| ENGBLOM PETER DAVIDself | 1 | 2016 |
| KÖHLER CARSTEN ANDREAS | 1 | 2016 |
| STAALS FRANK | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Portland, OR, US | 2 | 2019–2021 |
| Hillsboro, OR, US | 2 | 2018–2019 |
| Meridian, ID, US | 1 | 2016 |