LexDanaLexDanabeta
Inventor

Hideo Ishimori

Inventor
Ashigarakami-gun, JP

Overview

3→
Patents
2001–2003
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions100%
PatentTitleYear
6,628,402'Phase interference detecting method and system in interferometer, and light detector therefor'20036,353,473'Wafer thickness measuring apparatus and detection method thereof'20026,295,131'Interference detecting system for use in interferometer'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2003Patents assigned to HITACHI ELECTR ENG (3)· patent assignee history
2001–2003Based in Ashigarakami-gun, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI ELECTR ENG32001–2003
Locations
LocationPatentsSpan
Ashigarakami-gun, JP32001–2003