Inventor
Mingmei Wang
Inventor
Albany, NY, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices32%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
H01JElectric discharge tubes or discharge lamps27%
C09KMaterials for miscellaneous applications, not provided for elsewhere5%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
PatentTitleYear
10,490,404Method of in situ hard mask removal201910,483,127Methods for high precision plasma etching of substrates201910,211,065Methods for high precision plasma etching of substrates20199,881,807'Method for atomic layer etching'20189,768,033'Methods for high precision etching of substrates'20179,401,263'Feature etching using varying supply of power pulses'20168,916,472'Interconnect formation using a sidewall mask layer'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2016Patents assigned to GLOBALFOUNDRIES INC (2)· patent assignee history
2014Patents assigned to HU XIANG (1)· patent assignee history
2014Patents assigned to HUANG LIU (1)· patent assignee history
2014Patents assigned to WANG MINGMEI (1)· patent assignee history
2014Based in Ballston Lake, NY, US· patent location history
2016Based in Clifton Park, NY, US· patent location history
2017–2019Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2017–2019Based in Albany, NY, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2017–2019 |
| GLOBALFOUNDRIES INC | 2 | 2014–2016 |
| HU XIANG | 1 | 2014 |
| HUANG LIU | 1 | 2014 |
| WANG MINGMEIself | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Albany, New York, US | 5 | 2017–2019 |
| Clifton Park, New York, US | 1 | 2016 |
| Ballston Lake, New York, US | 1 | 2014 |