Inventor
Seitaro Matsuo
Inventor
Hachioji, JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps21%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
C23CCoating metallic material14%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1014%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
H05HPlasma technique4%
PatentTitleYear
7,485,204'ECR plasma source and ECR plasma device'20095,208,629'Optical projection exposure method and system using the same'19935,003,152'Microwave transforming method and plasma processing'19914,857,809'Microwave ion source'19894,566,940'Manufacturing process for semiconductor integrated circuits'19864,564,997'Semiconductor device and manufacturing process thereof'19864,543,266'Method of fabricating a membrane structure'19854,543,592'Semiconductor integrated circuits and manufacturing process thereof'19854,492,620'Plasma deposition method and apparatus'19854,450,031'Ion shower apparatus'19844,448,800'Method for the manufacture of semiconductor device using refractory metal in a lift-off step'19844,401,054'Plasma deposition apparatus'1983Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1983–1993Patents assigned to NIPPON TELEGRAPH & TELEPHONE (11)· patent assignee history
1983–1986Based in Hachioji, JP· patent location history
1984–1985Based in Isehara, JP· patent location history
1989–1993Based in Kanagawa, JP· patent location history
1991Based in Atsugi, JP· patent location history
2009Patents assigned to MES AFTY CORP (1)· patent assignee history
2009Based in Mitaka, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NIPPON TELEGRAPH & TELEPHONE | 11 | 1983–1993 |
| MES AFTY CORP | 1 | 2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hachioji, JP | 5 | 1983–1986 |
| Isehara, JP | 3 | 1984–1985 |
| Kanagawa, JP | 2 | 1989–1993 |
| Mitaka, JP | 1 | 2009 |
| Atsugi, JP | 1 | 1991 |