Inventor
Steven R. Walther
Inventor
Andover, MA, US
Overview
Patents· 34 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps34%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
G21KHandling of particles or ionising radiation not otherwise provided for8%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation5%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution5%
A61LMethods or apparatus for sterilising materials or objects in general3%
B29CShaping or joining of plastics3%
B65BMachines, apparatus or devices for, or methods of, packaging articles or materials3%
B67CCleaning, filling with liquids or semiliquids, or emptying, of bottles, jars, cans, casks, barrels, or similar containers, not otherwise provided for3%
C23CCoating metallic material3%
PatentTitleYear
10,843,911Lifting apparatus202010,076,020Apparatus and method for plasma ignition with a self-resonating device20189,736,920'Apparatus and method for plasma ignition with a self-resonating device'20178,766,523'Electron beam exit window in electron beam emitter and method for forming the same'20148,636,949'Electron beam sterilization apparatus'20148,470,616'Patterned assembly for manufacturing a solar cell and a method thereof'20138,339,024'Methods and apparatuses for reducing heat on an emitter exit window'20128,338,796'Electron beam emitter with slotted gun'20128,319,196'Technique for low-temperature ion implantation'20128,293,173'Electron beam sterilization apparatus'20128,222,053'Patterned assembly for manufacturing a solar cell and a method thereof'20127,993,698'Techniques for temperature controlled ion implantation'20117,939,424'Wafer bonding activated by ion implantation'20117,935,942'Technique for low-temperature ion implantation'20117,820,460'Patterned assembly for manufacturing a solar cell and a method thereof'20107,820,527'Cleave initiation using varying ion implant dose'20107,820,987'Predicting dose repeatability in an ion implantation'20107,675,730'Techniques for detecting wafer charging in a plasma processing system'20107,638,781'Local pressure sensing in a plasma processing system'20097,615,748'Outgassing rate detection'20097,544,957'Non-uniform ion implantation'20097,544,959'In situ surface contamination removal for ion implanting'20097,459,703'Ion implant beam angle integrity monitoring and adjusting'20087,396,746'Methods for stable and repeatable ion implantation'20087,378,335'Plasma implantation of deuterium for passivation of semiconductor-device interfaces'20087,342,240'Ion beam current monitoring'20087,326,937'Plasma ion implantation systems and methods using solid source of dopant material'2008RE040008'Method and apparatus for controlling ion implantation during vacuum fluctuation'20087,132,672'Faraday dose and uniformity monitor for plasma based ion implantation'20066,716,727'Methods and apparatus for plasma doping and ion implantation in an integrated processing system'20046,686,598'Wafer clamping apparatus and method'20046,521,895'Wide dynamic range ion beam scanners'20036,323,497'Method and apparatus for controlling ion implantation during vacuum fluctuation'20015,198,677'Production of N.sup.+ ions from a multicusp ion beam apparatus'1993Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1993Based in Salem, MA, US· patent location history
2001–2013Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (24)· patent assignee history
2001–2018Based in Andover, MA, US· patent location history
2012–2014Patents assigned to HITACHI SHIPBUILDING ENG CO (5)· patent assignee history
2012–2014Patents assigned to WALTHER STEVEN R (5)· patent assignee history
2012–2014Patents assigned to BUFANO MICHAEL L (3)· patent assignee history
2012–2014Patents assigned to FRIEDMAN GERALD M (3)· patent assignee history
2020Based in Saalfeld, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT | 24 | 2001–2013 |
| HITACHI SHIPBUILDING ENG CO | 5 | 2012–2014 |
| WALTHER STEVEN Rself | 5 | 2012–2014 |
| BUFANO MICHAEL L | 3 | 2012–2014 |
| FRIEDMAN GERALD M | 3 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Andover, Massachusetts, US | 32 | 2001–2018 |
| Saalfeld, DE | 1 | 2020 |
| Salem, Massachusetts, US | 1 | 1993 |