Inventor
Quyen Pham
Inventor
Sunnyvale, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material23%
G01BMeasuring length, thickness or similar linear dimensions23%
H01JElectric discharge tubes or discharge lamps23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
Y10TTechnical subjects covered by former us classification8%
PatentTitleYear
7,777,483'Method and apparatus for measuring a thickness of a layer of a wafer'20107,355,394'Apparatus and method of dynamically measuring thickness of a layer of a substrate'20087,112,961'Method and apparatus for dynamically measuring the thickness of an object'20066,592,817'Monitoring an effluent from a chamber'20036,271,148'Method for improved remote microwave plasma source for use with substrate processing system'20016,026,762'Apparatus for improved remote microwave plasma source for use with substrate processing systems'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2010Patents assigned to APPLIED MATERIALS INC (6)· patent assignee history
2000–2001Based in Union City, CA, US· patent location history
2003–2010Based in Sunnyvale, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 6 | 2000–2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 4 | 2003–2010 |
| Union City, California, US | 2 | 2000–2001 |