Inventor
Hari K. Ponnekanti
Inventor
San Jose, CA, US
Overview
Patents· 40 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01JElectric discharge tubes or discharge lamps16%
H01LSemiconductor devices13%
C23CCoating metallic material12%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors3%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation3%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution3%
A61BDiagnosis2%
B01DSeparation2%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry2%
PatentTitleYear
11,031,262Loadlock integrated bevel etcher system202110,854,432Rotary plasma electrical feedthrough202010,734,265Semiconductor process equipment202010,636,684Loadlock integrated bevel etcher system202010,597,785Single oxide metal deposition chamber202010,577,689Sputtering showerhead202010,518,418Wafer swapper201910,483,141Semiconductor process equipment201910,435,787Hydrogen partial pressure control in a vacuum process chamber201910,403,515Loadlock integrated bevel etcher system201910,403,535Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system201910,388,549On-board metrology (OBM) design and implication in process tool201910,236,197Processing system containing an isolation region separating a deposition chamber from a treatment chamber201910,056,279Semiconductor process equipment20189,889,567'Wafer swapper'20189,040,409'Methods of forming solar cells and solar cell modules'20158,900,427'Homing device for magnetron rotating on two arms'20148,859,324'Methods of manufacturing solar cell devices'20148,390,980'Electrostatic chuck assembly'20138,129,212'Surface cleaning and texturing process for crystalline solar cells'20128,021,527'Coaxial shafts for radial positioning of rotating magnetron'20117,655,092'Tandem process chamber'20107,049,606'Electron beam treatment apparatus'20066,831,284'Large area source for uniform electron beam generation'20046,645,303'Heater/lift assembly for high temperature processing chamber'20036,635,115'Tandem process chamber'20036,361,707'Apparatus and methods for upgraded substrate processing system with microwave plasma source'20026,354,241'Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing'20026,230,652'Apparatus and methods for upgraded substrate processing system with microwave plasma source'20016,163,007'Microwave plasma generating apparatus with improved heat protection of sealing O-rings'20006,152,070'Tandem process chamber'20006,082,950'Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding'20006,077,157'Process chamber exhaust system'20006,045,618'Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment'20006,039,834'Apparatus and methods for upgraded substrate processing system with microwave plasma source'20005,911,834'Gas delivery system'19995,855,681'Ultra high throughput wafer vacuum processing system'19995,844,195'Remote plasma source'19985,293,870'Method and apparatus for elastographic measurement and imaging'19945,178,147'Method and apparatus for elastographic measurement and imaging'1993Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1993–1994Patents assigned to UNIV TEXAS (2)· patent assignee history
1993–1994Based in Houston, TX, US· patent location history
1998–2021Patents assigned to APPLIED MATERIALS INC (38)· patent assignee history
1998–2010Based in Santa Clara, CA, US· patent location history
2000Based in Fremont, CA, US· patent location history
2004–2021Based in San Jose, CA, US· patent location history
2012–2014Patents assigned to PONNEKANTI HARI (3)· patent assignee history
2012–2014Patents assigned to STEWART MICHAEL P (2)· patent assignee history
2013Patents assigned to BROWN KARL M (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 38 | 1998–2021 |
| PONNEKANTI HARIself | 3 | 2012–2014 |
| STEWART MICHAEL P | 2 | 2012–2014 |
| UNIV TEXAS | 2 | 1993–1994 |
| BROWN KARL M | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 23 | 2004–2021 |
| Santa Clara, California, US | 14 | 1998–2010 |
| Houston, Texas, US | 2 | 1993–1994 |
| Fremont, California, US | 1 | 2000 |