Inventor
Viktor Kulitzki
Inventor
Zwickau, DE
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
G02BOptical elements, systems or apparatus20%
F16BDevices for fastening or securing constructional elements or machine parts together, e.g. nails, bolts, circlips, clamps, clips or wedges10%
G21KHandling of particles or ionising radiation not otherwise provided for10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1010%
PatentTitleYear
10,809,636Optical arrangement, in particular lithography system202010,761,436Optical arrangement, in particular lithography system, with a transport lock202010,571,813Connection arrangement for a force-fit connection between ceramic components20209,298,111'Optical arrangement in a projection exposure apparatus for EUV lithography'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2020Patents assigned to ZEISS CARL SMT GMBH (4)· patent assignee history
2016Patents assigned to DEUFEL PETER (1)· patent assignee history
2016Patents assigned to GELLRICH BERNHARD (1)· patent assignee history
2016Patents assigned to KULITZKI VIKTOR (1)· patent assignee history
2016Patents assigned to KWAN YIM-BUN PATRICK (1)· patent assignee history
2016–2020Based in Zwickau, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 4 | 2016–2020 |
| DEUFEL PETER | 1 | 2016 |
| GELLRICH BERNHARD | 1 | 2016 |
| KULITZKI VIKTORself | 1 | 2016 |
| KWAN YIM-BUN PATRICK | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Zwickau, DE | 4 | 2016–2020 |