Inventor
Ken-ichiro Shinoda
Inventor
Utsunomiya, JP
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
B29CShaping or joining of plastics13%
B82YSpecific uses or applications of nanostructures13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
G02BOptical elements, systems or apparatus8%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light3%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them3%
G05DSystems for controlling or regulating non-electric variables3%
H01LSemiconductor devices3%
H04NPictorial communication, e.g. television3%
PatentTitleYear
10,859,912Imprint apparatus, imprint method, and article manufacturing method202010,761,316Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article202010,386,737Imprint apparatus and method for producing article20199,910,351'Imprint apparatus and article manufacturing method'20189,625,837'Imprint apparatus and method of manufacturing article'20179,616,613'Imprint apparatus including alignment and overlay measurement'20179,541,825'Imprint apparatus and article manufacturing method'20179,465,308'Imprint apparatus, imprint method and method of manufacturing an article'20168,208,126'Exposure apparatus and device fabrication method'20127,955,765'Adjustment method, exposure method, device manufacturing method, and exposure apparatus'20117,385,672'Exposure apparatus and method'20087,242,457'Exposure apparatus and exposure method, and device manufacturing method using the same'20077,209,218'Exposure apparatus and method for manufacturing device using the exposure apparatus'20076,674,514'Illumination optical system in exposure apparatus'20046,560,044'Illumination optical system in exposure apparatus'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2020Patents assigned to CANON KK (15)· patent assignee history
2003–2020Based in Utsunomiya, JP· patent location history
2008Based in Tochigi, JP· patent location history
2012Patents assigned to SHINODA KEN-ICHIRO (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 15 | 2003–2020 |
| SHINODA KEN-ICHIROself | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Utsunomiya, JP | 14 | 2003–2020 |
| Tochigi, JP | 1 | 2008 |