Inventor
TOSHIAKI KODAMA
Inventor
JP
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01LSemiconductor devices26%
B25JManipulators19%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors6%
G01SRadio direction-finding6%
G01BMeasuring length, thickness or similar linear dimensions3%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
G06NComputing arrangements based on specific computational models3%
H01JElectric discharge tubes or discharge lamps3%
PatentTitleYear
12,461,212Substrate processing system and method of estimating height of annular member202512,440,971Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate202512,362,215Apparatus for transferring substrate and method for transferring substrate202512,249,527Substrate transport apparatus and substrate transport method202512,142,506Substrate transfer apparatus, substrate processing system and substrate processing method202412,009,240Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate202411,923,222Substrate transfer device and substrate gripping determination method202411,850,743Transport apparatus, semiconductor manufacturing apparatus, and transport method202311,434,087Transfer device, processing system, and transfer method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TOKYO ELECTRON LTD (9)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 9 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 9 | 2022–2025 |