Inventor
Tetsuya Yukimoto
Inventor
Chiba, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H05HPlasma technique22%
C23CCoating metallic material11%
H01JElectric discharge tubes or discharge lamps11%
H01LSemiconductor devices11%
H10DInorganic electric semiconductor devices11%
PatentTitleYear
10,229,814Plasma processing apparatus201910,147,585Plasma processing apparatus20188,802,567'Plasma processing method'20148,624,340'Plasma processing apparatus and method thereof'20147,666,793'Method of manufacturing amorphous metal oxide film and methods of manufacturing capacitance element having amorphous metal oxide film and semiconductor device'20106,916,747'Method of manufacturing amorphous metal oxide film and methods of manufacturing capacitance element having amorphous metal oxide film and semiconductor device'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2010Patents assigned to CV RES CORP (2)· patent assignee history
2005–2019Based in Chiba, JP· patent location history
2014–2019Patents assigned to PANASONIC CORP (4)· patent assignee history
2014Patents assigned to KAWAURA HIROSHI (1)· patent assignee history
2014Patents assigned to NAKAYAMA ICHIRO (1)· patent assignee history
2018–2019Patents assigned to PANASONIC IP MAN CO LTD (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| PANASONIC CORP | 4 | 2014–2019 |
| CV RES CORP | 2 | 2005–2010 |
| PANASONIC IP MAN CO LTD | 2 | 2018–2019 |
| KAWAURA HIROSHI | 1 | 2014 |
| NAKAYAMA ICHIRO | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Chiba, JP | 6 | 2005–2019 |