Inventor
HIROAKI SHIBUE
Inventor
JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing32%
G01BMeasuring length, thickness or similar linear dimensions23%
G01NInvestigating or analysing materials by determining their chemical or physical properties14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
H01LSemiconductor devices9%
G01RMeasuring electric variables5%
H01FMagnets5%
PatentTitleYear
12,241,738Detection signal processing apparatus and detection signal processing method for eddy current sensor202512,179,310Output signal processing apparatus for eddy current sensor202412,123,714Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor202412,083,646Polishing apparatus, polishing method and method for outputting visualization information of film thickness distribution on substrate202411,852,472Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor202311,759,912Magnetic element and eddy current sensor using the same202311,731,233Eddy current detection device and polishing apparatus2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to EBARA CORP (7)· patent assignee history
2023–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 7 | 2023–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 7 | 2023–2025 |