Inventor
Eric Wagganer
Inventor
Milpitas, CA, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Wprimary
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1033%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H10DInorganic electric semiconductor devices17%
B82YSpecific uses or applications of nanostructures8%
H01JElectric discharge tubes or discharge lamps8%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
PatentTitleYear
6,949,460'Line edge roughness reduction for trench etch'20056,630,407'Plasma etching of organic antireflective coating'20036,540,885'Profile control of oxide trench features for dual damascene applications'20036,146,986'Lithographic method for creating damascene metallization layers'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2005Patents assigned to LAM RES CORP (4)· patent assignee history
2000–2003Based in Milpitas, CA, US· patent location history
2005Based in Fremont, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 4 | 2000–2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Milpitas, California, US | 3 | 2000–2003 |
| Fremont, California, US | 1 | 2005 |