LexDanaLexDanabeta
Inventor

FONG-JIE DU

Inventor
JP

Overview

3→
Patents
2021–2025
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H01LSemiconductor devices20%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors10%
C23CCoating metallic material10%
PatentTitleYear
12,237,194Substrate transporter and substrate processing apparatus including substrate transporter202511,331,768Polishing head and polishing apparatus202211,180,853Substrate processing apparatus and substrate processing method2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021–2025Patents assigned to EBARA CORP (3)· patent assignee history
2021–2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
EBARA CORP32021–2025
Locations
LocationPatentsSpan
JP32021–2025