Inventor
TOMOKAZU TAKI
Inventor
JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
B29CShaping or joining of plastics17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
PatentTitleYear
12,023,850Position detection apparatus, imprint apparatus, and article manufacturing method202411,934,098Detection apparatus, lithography apparatus, and article manufacturing method202411,829,083Detection apparatus, lithography apparatus, article manufacturing method, and detection method202311,372,342Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2024Patents assigned to CANON KK (4)· patent assignee history
2022–2024Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 4 | 2022–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 4 | 2022–2024 |