Inventor
HUAN-CHIEH SU
Inventor
TW
Overview
Patents· 140 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Dprimary
H10DInorganic electric semiconductor devices29%
H01LSemiconductor devices24%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1019%
B82YSpecific uses or applications of nanostructures18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
C09KMaterials for miscellaneous applications, not provided for elsewhere0%
G01SRadio direction-finding0%
G02BOptical elements, systems or apparatus0%
G06TImage data processing or generation, in general0%
PatentTitleYear
12,588,242Field effect transistor with dual silicide and method202612,568,664Semiconductor device and method of manufacturing thereof202612,563,815Semiconductor structure having first silicide features and second silicide features and method for manufacturing the same202612,557,339Semiconductor device structure and methods of forming the same202612,550,370Semiconductor device and manufacturing method thereof202612,543,364Integrated circuit with backside metal gate cut for reduced coupling capacitance202612,538,510Semiconductor device and manufacturing method thereof202612,532,509Integrated circuit with backside trench for nanosheet removal202612,532,498Semiconductor device with reverse-cut source/drain contact structure and method thereof202612,532,505Semiconductor structure and method for forming the same202612,525,485Gate contact structure202612,507,438Semiconductor structure with contact rail and method for forming the same202512,506,066—202512,501,671Semiconductor device and manufacturing method thereof202512,500,142Semiconductor devices including through vias and methods of forming the same202512,495,601Gate structure for semiconductor device202512,484,254Integrated circuit structure with backside via rail202512,484,295Method (and related apparatus) for forming a semiconductor device with reduced spacing between nanostructure field-effect transistors202512,471,315Semiconductor device including spacers on sides of dielectric structure and manufacturing method thereof202512,457,794Dual side contact structures for source/drain regions in semiconductor transistor devices and method of forming202512,453,174Integrated circuits with finFET gate structures202512,453,159Drain side recess for back-side power rail device202512,439,680Multi-gate device and related methods202512,432,975Semiconductor device with backside power rail202512,424,486Integrated circuit structure with backside interconnection structure having air gap202512,424,484Spacers for semiconductor devices including backside power rails202512,414,362Fins disposed on stacks of nanostructures where the nanostructures are wrapped around by a gate202512,402,345Semiconductor structure and method for forming the same202512,389,618Semiconductor transistor device includes backside via electrically connecting epitaxial source/drain structures and method for forming the same202512,382,710Method for forming long channel back-side power rail device202512,376,356Semiconductor devices with backside power rail and methods of fabrication thereof202512,369,365Semiconductor devices with backside power rail and method thereof202512,363,964Semiconductor device having dielectric hybrid fin202512,363,946Source/drain contacts and methods of forming same202512,363,939Semiconductor device with backside power rail and methods of fabrication thereof202512,356,688Method for forming semiconductor device202512,349,409Semiconductor device having a gate contact on a low-k liner202512,336,215Semiconductor device structure and method for forming the same202512,328,917Semiconductor structure having second contact structure over second side of first S/D structure202512,324,188Field effect transistor with source/drain contact isolation structure and method202512,324,215Semiconductor device structure with metal gate stack202512,317,528Gate isolation feature and manufacturing method thereof202512,300,727Process and structure for source/drain contacts202512,302,607Backside gate contact202512,283,521Methods of forming spacers for semiconductor devices including backside power rails202512,278,273Semiconductor device with backside gate isolation structure and method for forming the same202512,272,634Semiconductor structure having an anchor-shaped backside via202512,266,658Semiconductor devices with backside contacts and isolation202512,266,700Semiconductor nanostructures device structure with backside contact202512,266,538Method for manufacturing semiconductor device using etchant composition having high etching selectivity202512,266,654FinFET devices and methods of forming the same202512,255,103Semiconductor structure with backside via contact and a protection liner layer202512,243,823Semiconductor device having backside gate contact202512,237,418Liner for a bi-layer gate helmet and the fabrication thereof202512,230,572Backside signal interconnection202512,224,212Semiconductor devices with backside air gap dielectric202512,205,819Method and device for forming metal gate electrodes for transistors202512,148,805Semiconductor structure with wraparound backside amorphous layer202412,148,795Increasing device density and reducing cross-talk spacer structures202412,142,692Semiconductor device with isolation structure202412,132,092Backside vias in semiconductor device202412,125,852Multi-gate transistors with backside power rail and reduced gate-drain capacitance202412,107,146Self-aligned air spacers and methods for forming202412,107,011Method for fabricating a semiconductor device202412,094,973Semiconductor devices with backside power rail and methods of fabrication thereof202412,057,341Semiconductor device with gate cut structure and method of forming the same202412,046,516Semiconductor device with gate cut feature and method for forming the same202412,034,004Method (and related apparatus) for forming a semiconductor device with reduced spacing between nanostructure field-effect transistors202412,021,136Gate isolation feature and manufacturing method thereof202412,009,394Source/drain contacts and methods of forming same202411,996,481Liner for a bi-layer gate helmet and the fabrication thereof202411,996,461Backside gate contact202411,984,350Integrated circuit structure with backside interconnection structure having air gap202411,978,802FinFET devices and methods of forming the same202411,978,773Formation method of semiconductor device structure with semiconductor nanostructures202411,955,552Semiconductor device with backside power rail and methods of fabrication thereof202411,955,515Dual side contact structures in semiconductor devices202411,948,973Gate-all-around field-effect transistor device202411,942,530Semiconductor devices with backside power rail and methods of fabrication thereof202411,935,794Method for forming long channel back-side power rail device202411,929,413Semiconductor device structure with metal gate stack202411,923,408Semiconductor devices with backside power rail and method thereof202411,915,972Methods of forming spacers for semiconductor devices including backside power rails202411,901,423Capacitance reduction for backside power rail device202411,901,428Semiconductor device with backside gate isolation structure and method for forming the same202411,854,908Multi-gate device and related methods202311,855,084Integrated circuits with FinFET gate structures202311,855,082Integrated circuits with FinFET gate structures202311,848,372Method and structure for reducing source/drain contact resistance at wafer backside202311,804,486Backside power rail and methods of forming the same202311,799,019Gate isolation feature and manufacturing method thereof202311,784,228Process and structure for source/drain contacts202311,784,233Integrated circuit structure with backside via rail202311,777,003Semiconductor structure with wraparound backside amorphous layer202311,769,696Method for fabricating a semiconductor device202311,742,428Formation method of semiconductor device with isolation structure202311,710,742Semiconductor devices with backside contacts and isolation202311,710,664Semiconductor structure with backside via contact and a protection liner layer202311,705,452Method (and related apparatus) for forming a semiconductor device with reduced spacing between nanostructure field-effect transistors202311,664,280Semiconductor devices with backside air gap dielectric202311,658,226Backside gate contact202311,658,220Drain side recess for back-side power rail device202311,658,119Backside signal interconnection202311,631,638Semiconductor structure having an anchor-shaped backside via202311,621,197Semiconductor device with gate cut feature and method for forming the same202311,616,143Semiconductor devices with backside power rail and methods of fabrication thereof202311,588,050Backside contact202311,581,224Method for forming long channel back-side power rail device202311,557,510Spacers for semiconductor devices including backside power rails202311,557,660Method and device for forming cut-metal-gate feature202311,551,969Integrated circuit structure with backside interconnection structure having air gap202311,532,714Semiconductor device and method of forming thereof202211,532,744Gate cut structure and method of forming the same202211,532,703Semiconductor device and method202211,532,713Source/drain contacts and methods of forming same202211,527,609Increasing device density and reducing cross-talk spacer structures202211,521,858Method and device for forming metal gate electrodes for transistors202211,502,201Semiconductor device with backside power rail and methods of fabrication thereof202211,482,595Dual side contact structures in semiconductor devices202211,482,594Semiconductor devices with backside power rail and method thereof202211,456,368Semiconductor device structure with hard mask layer over fin structure and method for forming the same202211,456,209Spacers for semiconductor devices including a backside power rails202211,450,751Integrated circuit structure with backside via rail202211,443,987Semiconductor devices with backside air gap dielectric202211,437,279Method for fabricating a semiconductor device202211,430,789Semiconductor devices with backside contacts and isolation202211,417,745Structure and formation method of semiconductor device with metal gate stack202211,404,548Capacitance reduction for backside power rail device202211,387,233Semiconductor device structure and methods of forming the same202211,380,682Integrated circuits with FinFET gate structures202211,349,004Backside vias in semiconductor device202211,329,165Structure and formation method of semiconductor device with isolation structure202211,328,963Multi-gate device and related methods202211,322,493Method (and related apparatus) for forming a semiconductor device with reduced spacing between nanostructure field-effect transistors202211,233,005Method for manufacturing an anchor-shaped backside via202211,222,892Backside power rail and methods of forming the same202211,211,293FinFET device and methods of forming the same202111,195,930Semiconductor devices with backside power rail and methods of fabrication thereof202111,158,512Fin field effect transistor (FinFET) device structure202111,152,487Method for manufacturing semiconductor device2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (140)· patent assignee history
2021–2026Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 140 | 2021–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 140 | 2021–2026 |