Inventor
William W. Cowans
Inventor
Fullerton, CA, US
Overview
Patents· 23 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
F25Bprimary
F25BRefrigeration machines, plants or systems38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
H01JElectric discharge tubes or discharge lamps10%
H05HPlasma technique10%
F28DHeat-exchange apparatus, not provided for in another subclass, in which the heat-exchange media do not come into direct contact6%
Y02ATechnologies for adaptation to climate change6%
A23GCocoa4%
F25DRefrigerators4%
F28FDetails of heat-exchange and heat-transfer apparatus, of general application2%
H01LSemiconductor devices2%
PatentTitleYear
10,386,101Method and apparatus for thermal exchange with two-phase media201910,342,241Temperature control system and method TDSF plus20199,372,020'Method and apparatus for thermal exchange with two-phase media'20169,360,243'Temperature control system and method TDSF plus'20168,980,044'Plasma reactor with a multiple zone thermal control feed forward control apparatus'20158,801,893'Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor'20148,689,575'Thermal control system and method'20148,546,267'Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control'20138,532,832'Method and apparatus for thermal exchange with two-phase media'20138,453,468'System and method for thermal control of different heat loads from a single source of saturated fluids'20138,337,660'Capacitively coupled plasma reactor having very agile wafer temperature control'20128,329,586'Method of processing a workpiece in a plasma reactor using feed forward thermal control'20128,291,719'Thermal control system and method'20128,240,160'Thermal control system and method'20128,221,580'Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops'20128,092,639'Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes'20127,988,872'Method of operating a capacitively coupled plasma reactor with dual temperature control loops'20117,765,820'Thermal control system and method'20107,661,460'Heat exchangers for fluid media'20107,415,835'Thermal control system and method'20087,243,500'Heat exchanger and temperature control unit'20077,178,353'Thermal control system and method'20076,446,446'Efficient cooling system and method'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2012Patents assigned to ADVANCED THERMAL SCIENCES CORP (8)· patent assignee history
2002–2019Based in Fullerton, CA, US· patent location history
2012–2019Patents assigned to BE AEROSPACE INC (15)· patent assignee history
2012–2016Patents assigned to COWANS KENNETH W (13)· patent assignee history
2012–2016Patents assigned to COWANS WILLIAM W (13)· patent assignee history
2012–2015Patents assigned to ZUBILLAGA GLENN W (9)· patent assignee history
2015Based in Fullterton, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BE AEROSPACE INC | 15 | 2012–2019 |
| COWANS KENNETH W | 13 | 2012–2016 |
| COWANS WILLIAM Wself | 13 | 2012–2016 |
| ZUBILLAGA GLENN W | 9 | 2012–2015 |
| ADVANCED THERMAL SCIENCES CORP | 8 | 2002–2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fullerton, California, US | 22 | 2002–2019 |
| Fullterton, California, US | 1 | 2015 |